On the effect of CH4+Ar mixture composition on both plasma parameters and plasma polymerization kinetics under the condition of dc glow discharge

Authors

  • S.M. Barinov Ivanovo State University of chemistry and technology, F. Engel’sa ave. 7, 153000, Ivanovo
  • A.M. Efremov Ivanovo State University of chemistry and technology, F. Engel’sa ave. 7, 153000, Ivanovo
  • A.А. Kuchumov Ivanovo State University of chemistry and technology, F. Engel’sa ave. 7, 153000, Ivanovo

DOI:

https://doi.org/10.18321/

Keywords:

mixture, argon, plasma, kinetics, polymerization

Abstract

The effects of CH4+Ar mixing ratio on plasma parameters, steady-state densities of neutral and charged species as well as on polymer film growth rates were investigated using a combination of experimental and modeling methods. On this base, some possible polymerization mechanisms were discussed.

References

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Published

2014-09-19

Issue

Vol. 12 No. 3 (2014): COMBUSTION AND PLASMA CHEMISTRY

Section

Статьи

License

Copyright (c) 2014 С.М. Баринов, А.М. Ефремов, А.А. Кучумов

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.

How to Cite

Barinov, S., Efremov, A., & Kuchumov, A. (2014). On the effect of CH4+Ar mixture composition on both plasma parameters and plasma polymerization kinetics under the condition of dc glow discharge. Combustion and Plasma Chemistry, 12(3), 177-182. https://doi.org/10.18321/
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